KLA D600 Probe-type surface profilometer
Product Introduction of KLA D600 Probe Surface Profilometer:
KLA D600 Probe-type surface profilometerThe optical lever sensor technology is adopted to provide high resolution, a large height measurement range and accurate micro-force control. The advantage of the contact measurement technology of the probe is direct measurement, which is independent of the material properties. Multiple force adjustments and probe size options enable the machine to accurately measure various structures and materials. These functions can characterize the changes in morphological features caused by the addition or removal of materials, as well as measure the roughness and stress changes resulting from alterations in material structure.
KLA D600 Probe-type surface profilometerIt includes a 200mm automatic sample stage and optical components with enhanced image control. The Alpha-Step profilometer is compact in size and specially designed for universities, laboratories and research institutes. It can be used forIt provides step height, roughness and stress measurements for semiconductor and compound semiconductor devices, leds, solar energy, MEMS, automotive and medical industries.
Product features of KLA D600 Probe Surface Profilometer:
5-megapixel high-resolution color camera
A flat scanning platform
A side view for measuring visualization
Force control range from 0.03 to 15 milligrams
The Z-direction scanning range can reach up to 1.2mm
200mm manual XY sample stage
Conforming to CE standards
Product advantages of KLA D600 probe-type surface profilometer:
It performs well in terms of repeatability and reproducibility
Contact measurement, suitable for a variety of materials
Micro-force control for measuring soft materials
Trapezoidal distortion correction can eliminate distortion caused by side views
Arc-shaped correction compensates for the arc-shaped movement of the probe
Measurement principle of KLA D600 probe-type surface profilometer product:
KLA D600 Probe-type surface profilometerOptical lever sensor technology is adopted. The optical lever sensor tracks the surface topography by using the laser beam reflected from the upper surface of the rotating shaft assembly. The reflected light beam is then projected onto the photodetector. For Alpha-Step, the light beam is divided into two parts: one side is projected onto the dual-cell photodetector, and the other side is projected onto the single-cell photodetector. This design enables high-resolution measurements of smaller steps on the first detector and larger steps on the second detector. The deflection of the laser beam changes when the probe traces the surface and is simultaneously sensed by the photodetector, which then converts this deflection into a topography signal. The advantage of optical levers lies in the small mass of the entire component, which enables low-force measurement. In addition, this sensor has a fast response speed and can track changes in surface morphology.
The main applications of the KLA D600 probe-type surface profilometer:
2D surface topography scanning | 3D surface topography scanning |
Roughness and waviness measurement | Measurement of sample warpage and radius of curvature |
Film stress measurement (Stoney equation) | Step height measurement from the nanometer level to 1.2 millimeters |
Industry applications of KLA D600 probe-type surface profilometer
Universities and laboratories
The KLA D600 probe-type surface profilometer is an important research tool for any university, research institution or laboratory. This system is capable of conducting direct contact measurements, and the results are independent of the properties of the material. Researchers can measure the deposition thickness of any transparent or opaque material. The Alpha-Step profilometer is easy to operate. With simple training, users can quickly master and use it.
Depressions produced by secondary ion mass spectrometry (SIMS)
Accurately measure the depth of the depression generated by secondary ion mass spectrometry (SIMS) to determine the relationship between ion concentration and depression depth. Measure the roughness of the concave bottom surface to characterize the uniformity of the ion beam energy.
Experimental production
The Alpha-Step probe profilometer is an ideal choice for small-batch experimental production. The operator can quickly focus and measure at multiple positions on the sample to reflect the process changes on the sample surface. The software of the Alpha-Step profilometer also supports the tracking of operator, system and batch information to facilitate statistical process control in production.
Conventional application
The Alpha-Step probe-type profilometer is widely used in production or research and development. For instance, it is used to measure the safety features of textiles and the roughness related to the light absorption rate of textiles, as well as applications in consumer electronics, including measuring the topography of touch screens and the height of film steps on glass screens.
Semiconductors and compound semiconductors
Measure the surface topography in the front-end, back-end and packaging processes of semiconductors, including the thickness of photoresist, etching depth, sputtering height, topography before and after CMP, roughness, sample warpage and stress, to improve process control.
Product parameters of KLA D600 Probe-type Surface profilometer:
Repeatability | 5 a (0.10%) | Vertical resolution | 0.38 A | Vertical range | 1200μm |
Needle pressure range | 0.03 ~ 15 mg | Horizontal resolution | 2D: 0.1μm 3D: 1μm | Maximum scanning length | 2D:30mm 3D:55mm*120mm |
Theta Stage (manual) : | 360 ° | Scanning speed | 10~400μm/s | Sample thickness | 30mm |
Sampling rate | 60~2000Hz | Diameter of the sample stage | 80mm and 20mm | XY range of motion (automatic) : | 150mm and 178mm |
Measurement diagram of KLA D600 probe-type surface profilometer:
